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Appl. Phys. Express 1 (2008) 055003 (3 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Quantitative Conductivity Mapping of SrTiO3–LaAlO3–LaTiO3 Ternary Composition-Spread Thin Film by Scanning Microwave Microscope

Sohei Okazaki1, Noriaki Okazaki2, Yasushi Hirose3,4, Jun Nishimura5, Kazunori Ueno5, Akira Ohtomo5,6, Masashi Kawasaki5,7,8, Hideomi Koinuma1,8, and Tetsuya Hasegawa3,4

1Department of Advanced Materials Science, The University of Tokyo, Kashiwa, Chiba 277-8568, Japan
2Institute of Health Biosciences, The University of Tokushima Graduate School, Tokushima 770-8505, Japan
3Kanagawa Academy of Science and Technology, Kawasaki 213-0012, Japan
4Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan
5Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
6PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
7WPI-Advanced Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
8CREST, Japan Science and Technology Agency, Tokyo 102-0075, Japan

(Received March 18, 2008; accepted April 2, 2008; published online April 25, 2008)

We carried out quantitative mapping of conductivity σ for the SrTiO3–LaAlO3–LaTiO3 (STO–LAO–LTO) ternary composition-spread thin film by using the scanning microwave microscope (SµM). The σ was evaluated from the shifts in Q-value with reference to the standard Ti1-xNbxO2 composition-spread thin film. Results for the ternary system showed excellent agreement with the literature values of σ in the binary STO–LAO and STO–LTO systems, confirming the accuracy of the present analysis method. An electric phase diagram was proposed for the ternary system based on the quantitative film-conductivity data. Metallic conduction in the ternary system was observed in a wide area close to the STO–LTO side, which gave way to the hopping conduction if LAO component exceeded ca. 35%. ©2008 The Japan Society of Applied Physics

URL: http://apex.ipap.jp/link?APEX/1/055003/
DOI: 10.1143/APEX.1.055003


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